CF4 (Carbon Tetrafluoride) Purification System Using Cryogenic Technology

◆◆ Key Applications ◆◆

1. Semiconductor Industry:

• Ultra-pure CF4 is critical for plasma etching of silicon wafers and cleaning chemical vapor deposition (CVD) chambers.

2. Electronics Manufacturing:

• Used as a dielectric gas in high-voltage equipment and as a feedstock for fluoropolymer production.

3. Environmental Remediation:

• Purifies CF4 from greenhouse gas recovery streams, enabling safe reuse or disposal.

4. Photonics and Lasers:

• Supplies high-purity CF4 for excimer laser gas mixtures (e.g., KrF, ArF lasers).

5. Aerospace:

• Provides CF4 for refrigeration and insulation systems in satellites and spacecraft.

◆◆ Technology and Features ◆◆

1. Cryogenic Purification Process:

• Feed Gas Pre-Treatment: Raw CF4 is compressed and passed through adsorbent beds (e.g., molecular sieves, activated alumina) to remove moisture, CO2, and acidic contaminants.

• Liquefaction and Distillation:

• The gas is cooled to cryogenic temperatures (-100°C to -150°C), where CF4 liquefies while lighter impurities (e.g., N2, O2) remain gaseous.

• A multi-stage cryogenic distillation column separates CF4 from heavier fluorocarbons (e.g., C2F6) based on boiling point differentials.

• Final Polishing: Residual impurities (<1 ppm) are removed using chemical scrubbers or getter materials.

2. System Components:

• Cryogenic Distillation Column: Stainless steel or nickel-alloy construction to withstand low temperatures and corrosive fluorinated gases.

• Heat Exchangers: Brazed aluminum or plate-fin designs for efficient thermal management.

• Automated Control System: PLC/SCADA interfaces for real-time monitoring of pressure, temperature, and purity.

• Safety Mechanisms: Explosion-proof valves, leak detectors, and emergency venting systems.

3. Energy Efficiency:

• Turboexpanders: Recover energy from high-pressure gas streams to power compressors.

• Cold Box Integration: Vacuum-insulated cold boxes minimize heat ingress, reducing energy consumption.

4. Modular and Scalable Design:

• Skid-mounted or containerized units for easy installation and capacity scaling (10–1,000 kg/h).

• Compatible with hybrid systems combining cryogenic and adsorption technologies.

◆◆ Advantages ◆◆

• Ultra-High Purity: Achieves 99.999% CF4 purity, meeting SEMI, ISO, and electronics-grade specifications.

• Cost Efficiency: Reduces waste and recycling costs by recovering CF4 from process exhaust.

• Environmental Compliance: Minimizes greenhouse gas emissions through closed-loop purification.

• Low Maintenance: Corrosion-resistant materials and automated controls extend equipment lifespan.

• Flexibility: Processes diverse feedstocks, including byproduct gases and recycled CF4.

◆◆ Visual Description (Text-Based) ◆◆

While actual photos cannot be provided, the system typically features:

• A vertical cryogenic distillation column housed in a vacuum-insulated cold box.

• Stainless steel piping networks with automated valves and pressure gauges.

• Skid-mounted modules containing compressors, heat exchangers, and control panels.

• Safety signage and hazard labels for handling fluorinated gases.

◆◆ Conclusion ◆◆

The cryogenic CF4 purification system is a cornerstone of high-tech industries requiring ultra-pure fluorinated gases. By combining cryogenic precision with robust engineering, it addresses critical challenges in semiconductor manufacturing, environmental sustainability, and advanced material production. Its ability to deliver unmatched purity, energy efficiency, and operational reliability positions it as an indispensable tool for industries driving innovation in the digital and green energy eras.

Note: For visual references, consult industrial gas equipment manufacturers (e.g., Linde, Air Liquide) or request technical brochures.

◆◆ RFQ ◆◆

1. Are you the manufacturer of this equipment？

Yes, we are an experienced manufacturer specializing in this field for 25 years.

2. Can the system be customized to meet specific requirements？

We provide custom-engineered solutions for different applications.

3. Have your products been deployed in global markets?

Yes, we have successfully supplied our air separation plants to over 50 countries worldwide, complying with international standards like ASME.

4. What after-sales services do you provide?

We offer comprehensive after-sales support including:

✔ Technical Consultation - 24/7 expert guidance

✔ Remote Monitoring - Real-time system performance tracking

✔ Maintenance Packages - Scheduled inspections & consumable replacements

✔ On-site Service -Engineer oversea service available

✔ Spare Parts Supply - Original components with 18-month warranty

✔ Operator Training - Customized programs for client's technical team

5. Do you offer technical support services?

We cordially invite you to visit our manufacturing facility or participate in our online technical exchange seminar for detailed discussions.

We welcome you to reach out to our technical specialists for detailed consultations and customized solutions.