Nitrogen Gas Plant for Electronics and Semiconductor Manufacturing

◆◆ Key Components and Process Overview ◆◆

1. Air Compression and Purification:

• Ambient air is compressed and filtered to remove particulates, moisture, CO₂, and hydrocarbons.

• Pre-purification units (e.g., molecular sieves) ensure contaminants are eliminated before cryogenic processing.

2. Cryogenic Cooling and Liquefaction:

• The purified air is cooled to extremely low temperatures (below -196°C) using heat exchangers and turboexpanders, causing it to liquefy.

• This liquefied air enters a distillation column (fractionating column), where components are separated based on their boiling points.

3. Fractional Distillation:

• Nitrogen (boiling point: -196°C) and oxygen (boiling point: -183°C) are separated in the column.

• Nitrogen gas is drawn off as a high-purity product, while oxygen and trace noble gases (e.g., argon) are collected as byproducts or vented.

4. Storage and Distribution:

• Liquid nitrogen (LN₂) is stored in insulated tanks.

• For semiconductor facilities, nitrogen is vaporized and delivered via pipelines in gaseous form, often at purities exceeding 99.9999% (6N).

◆◆ Why Cryogenic Nitrogen for Electronics/Semiconductors? ◆◆

• Ultra-High Purity: Cryogenic plants achieve ppb (parts per billion) levels of impurities, essential for processes like lithography, chemical vapor deposition (CVD), and etching, where even trace oxygen or moisture can ruin microchips.

• Scalability: Suitable for large-volume demands in fabs (fabrication plants).

• Consistency: Provides a stable, on-site supply, reducing reliance on third-party gas deliveries.

◆◆ Applications in Semiconductor Manufacturing ◆◆

1. Inert Environment:

• Prevents oxidation during wafer annealing, soldering, or packaging.

• Used in glove boxes and cleanrooms.

2. Process Gas:

• Carrier gas for dopants in CVD and epitaxy.

• Purge gas to clear reactive residues in etching chambers.

3. Cooling:

• LN₂ cools equipment, such as ion implanters or vacuum pumps.

◆◆ Advantages of Cryogenic Nitrogen Plants ◆◆

• Cost Efficiency: Lower operational costs for high-volume users compared to bottled nitrogen.

• Reliability: Continuous supply reduces production downtime risks.

• Customization: Purity, pressure, and flow rates can be tailored to fab requirements.

◆◆ Challenges ◆◆

• High capital investment for infrastructure (e.g., distillation columns, cryogenic storage).

• Energy-intensive cooling process.

• Requires rigorous maintenance to ensure purity standards.

In summary, cryogenic nitrogen plants are indispensable in electronics and semiconductor manufacturing, delivering the ultra-pure, reliable nitrogen supply needed to maintain defect-free production and advanced process control.

◆◆ RFQ ◆◆

1. Are you the manufacturer of this equipment？

Yes, we are an experienced manufacturer specializing in this field for 25 years.

2. Can the system be customized to meet specific requirements？

We provide custom-engineered solutions for different applications.

3. Have your products been deployed in global markets?

Yes, we have successfully supplied our air separation plants to over 50 countries worldwide, complying with international standards like ASME.

4. What after-sales services do you provide?

We offer comprehensive after-sales support including:

✔ Technical Consultation - 24/7 expert guidance

✔ Remote Monitoring - Real-time system performance tracking

✔ Maintenance Packages - Scheduled inspections & consumable replacements

✔ On-site Service -Engineer oversea service available

✔ Spare Parts Supply - Original components with 18-month warranty

✔ Operator Training - Customized programs for client's technical team

5. Do you offer technical support services?

We cordially invite you to visit our manufacturing facility or participate in our online technical exchange seminar for detailed discussions.

We welcome you to reach out to our technical specialists for detailed consultations and customized solutions.