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◆◆ Key Features ◆◆
Nanoscale Purity Control – O₂ < 0.1 ppm, H₂O < 0.5 ppm, THC < 0.1 ppm
Vibration-Free Operation – prevent wafer damage
Smart Particle Filtration – Class 1 ISO-certified particulate removal
Energy Recovery System – Up to 40% energy savings with heat integration
Zero Contamination Design – Electropolished stainless steel piping with ultra-clean passivation
◆◆ Critical Semiconductor Applications ◆◆
1. Wafer Fabrication
Photolithography chamber purging
Sputtering & CVD process gas
Annealing furnace atmosphere control
2. Electronics Manufacturing
Cryogenic testing of microchips
Laser diode cooling
Superconducting circuit production
3. Vacuum & Controlled Environments
Mass spectrometer blanketing
Cleanroom pressurization
3D NAND flash memory production
◆◆ Technical Specifications ◆◆
Parameter | Specification |
Capacity | 300–10,000 Nm³/day |
Purity | 99.9999% (6N grade) |
Dew Point | <-80°C |
Pressure Stability | ±0.1% fluctuation |
◆◆ Advanced Control Systems ◆◆
Purity Monitoring – online analyzer
Predictive Maintenance – gas chromatography integration
◆◆ Why Our System ◆◆
Zero Downtime Design – automatic switchover
Turnkey Installation – Includes cleanroom-compatible piping & gas analyzers
Need validation data for your node size? Contact our semiconductor gas specialists today!
◆◆ RFQ ◆◆
1. Are you the manufacturer of this equipment?
Yes, we are an experienced manufacturer specializing in this field for 25 years.
2. Can the system be customized to meet specific requirements?
We provide custom-engineered solutions for different applications.
3. Have your products been deployed in global markets?
Yes, we have successfully supplied our air separation plants to over 50 countries worldwide, complying with international standards like ASME.
4. What after-sales services do you provide?
We offer comprehensive after-sales support including:
✔ Technical Consultation - 24/7 expert guidance
✔ Remote Monitoring - Real-time system performance tracking
✔ Maintenance Packages - Scheduled inspections & consumable replacements
✔ On-site Service -Engineer oversea service available
✔ Spare Parts Supply - Original components with 18-month warranty
✔ Operator Training - Customized programs for client's technical team
5. Do you offer technical support services?
We cordially invite you to visit our manufacturing facility or participate in our online technical exchange seminar for detailed discussions.
We welcome you to reach out to our technical specialists for detailed consultations and customized solutions.