Liquid Nitrogen Plant for Electronics and Semiconductor Manufacturing

◆◆ Key Features ◆◆

• Nanoscale Purity Control – O₂ < 0.1 ppm, H₂O < 0.5 ppm, THC < 0.1 ppm

• Vibration-Free Operation –  prevent wafer damage

• Smart Particle Filtration – Class 1 ISO-certified particulate removal

• Energy Recovery System – Up to 40% energy savings with heat integration

• Zero Contamination Design – Electropolished stainless steel piping with ultra-clean passivation

◆◆ Critical Semiconductor Applications ◆◆

1. Wafer Fabrication

• Photolithography chamber purging

• Sputtering & CVD process gas

• Annealing furnace atmosphere control

2. Electronics Manufacturing

• Cryogenic testing of microchips

• Laser diode cooling

• Superconducting circuit production

3. Vacuum & Controlled Environments

• Mass spectrometer blanketing

• Cleanroom pressurization

• 3D NAND flash memory production

◆◆ Technical Specifications ◆◆

◆◆ Advanced Control Systems ◆◆

• Purity Monitoring – online analyzer

• Predictive Maintenance – gas chromatography integration

◆◆ Why Our System ◆◆

• Zero Downtime Design –  automatic switchover

• Turnkey Installation – Includes cleanroom-compatible piping & gas analyzers

Need validation data for your node size? Contact our semiconductor gas specialists today!

◆◆ RFQ ◆◆

1. Are you the manufacturer of this equipment？

Yes, we are an experienced manufacturer specializing in this field for 25 years.

2. Can the system be customized to meet specific requirements？

We provide custom-engineered solutions for different applications.

3. Have your products been deployed in global markets?

Yes, we have successfully supplied our air separation plants to over 50 countries worldwide, complying with international standards like ASME.

4. What after-sales services do you provide?

We offer comprehensive after-sales support including:

✔ Technical Consultation - 24/7 expert guidance

✔ Remote Monitoring - Real-time system performance tracking

✔ Maintenance Packages - Scheduled inspections & consumable replacements

✔ On-site Service -Engineer oversea service available

✔ Spare Parts Supply - Original components with 18-month warranty

✔ Operator Training - Customized programs for client's technical team

5. Do you offer technical support services?

We cordially invite you to visit our manufacturing facility or participate in our online technical exchange seminar for detailed discussions.

We welcome you to reach out to our technical specialists for detailed consultations and customized solutions.